A guided-mode resonance (GMR) filter with the same material (Ta2O5) for both the grating layer and the waveguide layer is designed and fabricated. This simple structure is easy to fabricate and can avoid the defects at the grating/waveguide interface using different materials. The spectral response measured with a Lambda 900 spectrophotometer under normal incidence for TE waves exhibits a peak reflectance exceeding 80% at the wavelength of 1040 nm with a full-width half-maximum (FWHM) linewidth of 23 nm. We evaluate the deviations of the fabricated structure from the designed parameters.

An internal Brewster guided-mode resonance (GMR) filter is designed. For this kind of GMR filter, the Brewster reflection occurs at the interface of grating/waveguide layers rather than at the interface of air/grating layers. At Brewster angle of 60\circ the GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum (FWHM) of 0.2 nm. Its angle response changing with the fabrication deviation is also discussed.

In this letter, a guided-mode resonance (GMR) filter with the same material for both the grating layer and the waveguide layer is designed, and its optical properties are investigated. The GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum (FWHM) of 20 nm, and its sideband reflection from 700 to 1000 nm is less than 5%. As the resonance wavelength is influenced by more than one parameter during the fabrication process, GMR filter with the same resonance wavelength can be obtained by adjusting other parameters or even one parameter to deviate from the design value.

The reflection and transmittance of s- and p-polarized lights should be treated separately at nonzero angle incidence. By choosing two special film materials whose refractive indices meet the Brewster condition in a given incident angle, the reflection of p-polarized light can be eliminated. When the two materials are fabricated into multilayer stacks, the reflection of s-polarized light can be largely increased while the reflection of p-polarized light keeps low. According to this principle, a film polarizer with bandwidth of 198 nm or even more is designed.

When optical film is deposited at oblique angle incidences, the film becomes porously, and the film effective refractive index will decrease. Six porous ZrO2 films are fabricated by the glancing angle deposition (GLAD) technique with the different incidence angles. By changing the substrate tilt angle from 0 to 85 degrees, the film refractive index varies from 1.92 to 1.27.